Semiconductors are materials — such as silicon or gallium arsenide — whose electrical conductivity falls between that of conductors and insulators. They form the foundation of modern electronics, enabling integrated circuits and microprocessors found in everything from smartphones to industrial automation systems.
In the precision-driven world of semiconductor manufacturing, even minor process variations can impact yield, quality, and tool longevity. Monitoring critical tool parameters—such as pressure, flow, and temperature—is essential for maintaining stable operations, meeting process tolerances, and ensuring compliance with safety and environmental standards.
DwyerOmega offers a comprehensive suite of sensing and control solutions engineered to address these challenges directly within semiconductor tools and subfab support systems.
Pressure
DwyerOmega’s pressure instrumentation is used to monitor the flow between process tools and fume exhaust systems.
Series-2-5000 Compact Low Differential Pressure Gauge
Combining clean design, small size, and low cost with enough accuracy for all but the most demanding applications, our Series-2-5000 Minihelic® II is easy to read and operate at total pressures up to 30 psig. It has a removable lens and rear-housing for easy, cost-effective maintenance.
Series-MP Mini-Photohelic® Differential Pressure Switch/Gage
The Series-MP Mini-Photohelic® Differential Pressure Switch/Gage combines the time-proven Minihelic® II gage with two SPDT switching set points. The Mini-Photohelic® Switch/Gage is designed to measure and control positive, negative, or differential pressures consisting of non-combustible and non-corrosive gases. The gauge reading is independent of switch operation, and switch status is visible by LED indicators located on the front and rear of the gauge.
Series DHC Digihelic® Controller
The Series DHC Digihelic® Controller is a 3-in-1 instrument possessing a digital display gage, control relay switch options, and a transmitter with both current and voltage outputs. Combining these three features allows the reduction of several instruments with one product, saving inventory, installation time, and cost.
The Series DHC is the ideal instrument for pressure, velocity, and volumetric flow applications reading in several commonly used engineering units with optional unidirectional or bidirectional ranges. These units achieve a 1.5% or better accuracy on extremely low ranges, and 0.5% accuracy for ranges at or above 1 in w.c.
Series-3000MR-3000MRS Photohelic® Switch/Gage
Using solid state technology, the Series-3000MR-3000MRS Photohelic® Switch/Gage combines the function of a precise, highly repeatable differential pressure switch with a large easy-to-read analog pressure gauge employing a durable, time-proven Magnehelic® gauge design. Switch setting is easy to adjust with large external knobs on the gauge face. Gauge reading is unaffected by switch operation and will indicate accurately even if power is interrupted. Units can be flush mounted or surface mounted with hardware supplied.
Series-MDS Mini Pressure Switch
The Series-MDS Mini Pressure Switch is designed with a double diaphragm to protect false actuation due to shock and vibration. This low cost pressure switch has a minimum 20 million cycle life expectancy, and an extremely fast response time.
Flow
DwyerOmega flowmeters monitor the inert gasses being used to purge process tool chambers.
Series-RM Precision Flowmeters
Series-RM Rate-Master® Precision Flowmeters are a line of general use, direct reading precision flowmeters suitable for both gas and liquid applications. These flowmeters have a long operation life with a durable, shatter-proof polycarbonate body.
They also have high repeatability and increased accuracy due to precision injection molding around a precision tapered pin and special integral flow guides that stabilize float movement.
Series-MM Custom Mini-Master® Flowmeters
Series-MM Custom Mini-Master® Flowmeters are suitable for both gas and liquid applications. Their precision molding enables high repeatability while the white back on the flow tube allows for better visibility of the float, increasing reading accuracy. Mini-Master® flowmeters are compact, requiring minimal space.
Series-VF Acrylic Flowmeters for Gas & Liquid
Series-VF Acrylic Flowmeters for Gas & Liquid are a line of direct reading, precision machined, clear acrylic body flowmeters suitable for both gas and liquid applications. The fabrication of the Visi-Float® flowmeters is backed by over 60 years of experience in acrylic instrument machining. The solid, clear acrylic body and tapered bores are cut and precision machined for high repeatability. The direct reading scales are hot stamped into the plastic with a smooth white background allowing for increased reading accuracy and increased product operating life.
Series-TVA Fluoropolymer Flowmeters for High Purity & Corrosive Liquids
Series-TVA Fluoropolymer Flowmeters for High Purity & Corrosive Liquids are ideal for high purity or corrosive liquid applications. This series of flowmeters features a 0 to 10 scale graduations denoting a discrete flow rate.
Series-VAT Fluoropolymer Flowmeter for High-Purity Liquids
The Series-VAT Fluoropolymer Flowmeter for High-Purity Liquids is ideal for high purity or corrosive liquid applications. This series of flowmeters features a 0 to 10 scale for flow indication. Each unit is individually leak tested to a leak integrity rating of 1 x 10-7 sccs Helium or better.
Series-P2 Piston Flow Switch for Air & Water
The Series-P2 Piston Flow Switch for Air & Water utilizes a piston-type design for both air and pure water applications. The switches have preset actuation points from 0.05 to 1.0 GPM for water and 25 CFH to 5 CFM for air. An economical and superior design makes this an excellent switch for pure water equipment, filter life monitoring, heat exchangers, and cooling applications.
Temperature
Our instrumentation controls levels in process chambers, reverse osmosis deionization (RO/DI) water heating, hot solvent, and acid processes.
Series-32A Compact 1/32 DIN Temp/Process Controllers
Series-32A Compact 1/32 DIN Temp/Process Controllers set a new standard in 1/32 DIN power, flexibility, and value. This group of controls offers the highest level of features in the most compact industry standard size. Ease of use is assured with these dual display 1/32 DIN temperature/process controllers.
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