FMA6500-Series

Supported Applications

The Omega FMA6500 Series consists of microprocessor-driven digital mass flow controllers designed for the precise control and monitoring of clean gases. These units are engineered to program, record, and analyze gas flow rates via a computer interface using an RS485 standard (with optional RS-232 availability). The series supports multi-drop capability allowing up to 256 units on a single network.

Documented applications include the control of various clean gases. Specific calibration data can be stored for up to 10 different gases, and conversion factors are available for up to 256 gases within the controller memory. The series includes alarm functions for high and low gas flow limits and features a totalizer function to track total gas quantity.

Operating Conditions & Performance

The FMA6500 Series operates with an ambient temperature range of 5 to 50°C (41 to 122°F). The controllers are designed for clean gases and feature a maximum gas pressure rating of 34.5 bar (500 psig).

• Accuracy: ±1% of FS at 15 to 25°C (59 to 77°F) and 0.7 to 4 bar (10 to 60 psia); ±1% of FS at 0 to 50°C (32 to 122°F) and 0.3 to 10 bar (5 to 150 psia). Special calibration options provide ±2% of FS or ±1% of FS at specific temperature and pressure conditions.
• Repeatability: ±0.15% FS
• Response Time: 0.6 to 1.0 s to within ±2% of setpoint over 20% to 100% FS.
• Power Supply Requirement: ±15 Vdc (power supply sold separately).

The series includes an autotune function for optimum control response and self-diagnostic tests. Flow ranges specified are valid for nitrogen or air at 20 psig inlet pressure (up to 50 SLM) or 25 psig inlet pressure (60 to 100 SLM units), with a 0 psig outlet.

Configuration Options

The series offers configurable flow ranges, process connections, and output options tailored to specific installation needs. The standard electrical connection is a 25-Pin D-Connector Male.

• Flow Ranges: Available from 10 SCCM up to 100 SLM (Standard Liters per Minute). Specific models include FMA6502ST through FMA6542ST covering ranges such as 10, 20, 50, 100, 200, and 500 SCCM; 1, 2, 5, 10, 15, 20, 30, 50 SLM; and higher capacities up to 60, 80, and 100 SLM.
• Process Connections: Standard ¼" compression fittings are used for models up to 30 LPM. Models rated at 60 LPM and greater utilize ⅜" compression fittings.
• Output Signals: The standard output is 0 to 5 Vdc (2000 Ω min load impedance). Optional configurations include 4 to 20 mA (0 to 500 Ω loop resistance) or 0 to 10 Vdc (4000 Ω min impedance).
• Communication: RS-485 is standard. An optional suffix "-RS232" replaces the RS-485 interface with RS-232 at no additional cost.

Key Product Differences

The FMA6500 Series distinguishes itself through specific model numbers that correspond to maximum flow rates and physical dimensions. Two primary dimensional profiles exist based on the flow capacity:

• Up to 10 LPM Models: Dimensions are Height: 157.1 mm (6.19 in), Width: 12.7 mm (0.50 in), Depth: 133.8 mm (5.27 in). The valve assembly measures 17.5 mm height, 74.3 mm width, and 4.0 mm depth.
• 15 LPM and Greater Models: Dimensions are Height: 167.0 mm (6.58 in), Width: 15.9 mm (0.63 in), Depth: 149.1 mm (5.87 in). The valve assembly measures 17.5 mm height, 68.3 mm width, and 10.3 mm depth.

Wetted materials include 316 stainless steel, FKM O-rings, and 416 stainless steel. Perfluoroelastomer O-rings are available as an option by adding the suffix "-K" to the model number (replacing standard Neoprene or FKM). Calibration services are offered via accessory code FMA65-CAL-(*) for a 10-point NIST calibration per gas, supporting up to 9 gases.

Power supply options vary by region and interface requirement: FMA65PWC (110 Vac), FMA65EPWC (230 Vac European), and FMA65UKPWC (230 Vac UK) are available with stripped wires for computer port connection. The FMA65PWA power supply includes an analog interface branch.