FMA5000A-Series

Gas Mass Controllers With or Without Built-in Display

Models In Stock

NIST Traceable Calibration
Reads and Controls Gas Mass Flow Without Temperature or Pressure Compensation
Available in Economical Aluminum or Corrosion-Resistant 316 SS
Tiltable LCD Display for Easy Reading

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FMA5000A-Series

From ^€ 1.120,48

Models In Stock

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Data Sheet

Product Overview

Accuracy Detail For units with full range less than 100 SLM ± 1% FS, including linearity over 15 to 25°C (59 to 77°F) and 0.7 to 4.2 kg/cm² (10 to 60 psia). For units ≥ 100 SLM Full Range: ± 1.5% FS, including linearity over 15 to 25°C (59 to 77°F) and 0.7 to 4.2 kg/cm² (10 to 60 psia) from 20 to 100% of range; ± 3% FS from 0 to 20% of range
Altitude Sensitivity Horizontal flow path, no shift in calibration up to +20 degree pitch
Calibration NIST Certificate
Control Valve Solenoid Valve
Electrical Output 4 to 20 mA, 0 to 5 Vdc
Enclosure Ratings Inst. Level II/Poll. Degree II (IEC 60664)
Humidity Range 0 to 70% RH
Leak Rate Under Vacuum less than 10^⁻⁷ cc He/s
Operating Pressure, Min 0 psi
Operating Pressure Note 35 kg/cm² gage (500 psig); 70 kg/cm2 gage (1000 psig) for ranges up to 100 SLPM. 1.76 kg/cm (25 psig) optimum
Operating Temperature, Max 50 °C
Operating Temperature, Min 5 °C
Output Detail Linear 0 to 5 Vdc: 1000 V minimum load 4 to 20 mA: 50 to 500 V loop resistance, ± 20 mV max noise
Output Signal Current, Voltage
Pressure Coefficient 0.01% FS/psi
Pressure Drop, Max 50 psi
Repeatability ± 0.5%
Response Time 5 sec
Response Time Note 5 seconds to within ± 2% of set flow rate over 25 to 100% FS
Supply Current Up to 800 mA
Supply Voltage 12 to 15 Vdc
Temperature Coefficient 0.15% FS/°C
Turndown Ratio 40:1
Volumetric Flow Rate, Min 0.25 SCCM

The FMA5400A/5500A Series electronic gas mass flow controllers provide for controlling the flow of a wide variety of gases from 0-10 SCCM up to 100 SLM. Utilizing heat transfer through a heated tube to measure molecular gas flow rate, the FMA5400A/5500A provides measurement of direct gas mass flow rate, without the need to compensate for variations in gas temperature or pressure (within stated limits). They are available in an economical aluminum/brass construction for typical gas flows and a 316 SS construction for applications requiring more corrosion resistance. The FMA5400A series without integral display is supplied with both an analog 0-5 Vdc and 4 to 20 mA output for remote monitoring; the FMA5500A series has both an integral 3-1/2 digit display and analog output. The display is tiltable over 90 degrees for viewing convenience. The display is calibrated standard to read out directly in SCCM or SLM for nitrogen (other gas calibrations available on special order).

The FMA5400A/5500A mass flow controllers feature a built-in normally-closed electromagnetic valve for maintaining a constant flow rate regardless of variations in inlet or outlet pressures. The setpoint is controlled either locally via a potentiometer accessible through an access window in the case or remotely via an analog 0-5 Vdc or 4-20 mA signal (field selectable). The FMA5400A/5500A series require 12 to 26 Vdc power @ 800 mA maximum, which can be supplied by the FMA545PW wall plug-in socket power supply. 12 to 15 Vdc power @ 800 mA maximum (Sizes 43,44, and 45 ONLY). Model number FMA545C (supplied separately) provides a mating 15-pin “D” connector with 8 feet of shielded cable for accessing the analog output signals and power input connections. The LCD supplied with the FMA5500A series is connected to the lower electronics via a modular plug. The LCD can be remotely located by purchasing an FMA18RC remote cable assembly–you must then build your own assembly for panel mounting the LCD.

PDFs & Manuals

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