FMA3000-Series

Supported Applications

The Omega FMA3000 Series comprises mass flow sensors, meters, and controllers designed for the measurement of clean, dry gases. The series supports applications involving air, nitrogen, carbon dioxide, argon, hydrogen, helium, methane, and oxygen. A 20-micron filter is required if the gas stream contains any particulate matter.

Operating Conditions & Performance

The FMA3100/3300 Series flow sensors utilize a patented thermal mass flow sensor design where output relates to the specific heat characteristic of the measured gas. Accuracy is specified as ±1.5% FS, with an additional linearity adjustment: add ±0.5% for ranges up to 500 SCCM and ±1.0% over 500 SCCM. Repeatability is stated at ±0.5% FS.

Performance specifications apply under the following conditions:

• Ambient temperature: 18 to 25°C (64 to 77°F)
• Warm-up time: At least 10 min
• Power input voltage stable at 12V ±0.1V typical
• Accuracy range: 10 to 100%
• Line pressure of 1 to 30 psi for FMA3100 and FMA3300; factory-specified settings for FMA3200

The response time is typical at 2 seconds to within ±2% of actual flow rate from 25 to 100% of full scale. The series operates with an ambient temperature range of 10 to 50°C (50 to 122°F) in a non-condensing atmosphere.

Pressure Ratings and Drop

The maximum pressure rating is up to 150 psi at 25°C (77°F). The FMA3200 Series requires a differential pressure of 15 to 40 psi. Pressure drop varies by model and flow rate:

• FMA3101/FMA3301 through FMA3102/FMA3302: 1" H₂O at max flow
• FMA3103/FMA3303 through FMA3105/FMA3305: 2" H₂O at max flow
• FMA3106/FMA3306 and FMA3107/FMA3307: 3" H₂O at max flow
• FMA3108/FMA3308 and FMA3109/FMA3309: 10" H₂O at max flow
• FMA3200 Series Controllers (FMA3202 through FMA3206): 15 psi pressure drop at max flow

Configuration Options

The series is available in three primary configurations: the FMA3100 mass flow sensors, the FMA3200 mass flow controllers, and the FMA3300 meters with an adjustable 3½ digit LCD digital display. The FMA3300 displays flow rate in engineering units (mL/min or L/min).

Measurement Ranges

The series supports a wide envelope of gas mass flow ranges:

• Low range: 0 to 20 SCCM, 0 to 50 SCCM, 0 to 100 SCCM, 0 to 200 SCCM
• Mid range: 0 to 500 SCCM
• High range: 0 to 1 SLM, 0 to 2 SLM, 0 to 5 SLM, 0 to 10 SLM

Note that flow ranges are based on dry air or nitrogen as a standard; other gases (carbon dioxide, helium, argon, hydrogen, methane, oxygen) are available for an additional cost.

Electrical and Process Connections

The FMA3100 and FMA3200 series utilize 6 Pin Mini Din, 9 Pin D Sub, or 15 Pin D Sub connectors. The output signal is typically 0 to 5 Vdc (minimum load resistance 2500 Ω). Power supply requirements are:

• FMA3100 and FMA3300: 12 to 15 Vdc, 100 mA (1.5 W)
• FMA3200: 12 to 15 Vdc, 250 mA (3.75 W)

Process connections vary by flow range:

• ¼" compression fittings for ranges up to 1 L/min
• ⅜" compression fitting for up to 5 L/min
• ½" compression fitting for 10 L/min

The FMA3200 controllers feature a normally closed valve with a cycle life of >1 million cycles, a control range of 50:1, and a turndown ratio of 10:1. A remote setpoint voltage input is available at 0 to 5 Vdc.

Materials

The series incorporates anodized aluminum housings with wetted materials including FKM O-rings, 304 and 316 SS, epoxy, and acetal compression tube fittings. The manual also notes the use of 316L Stainless Steel and PTFE in specific configurations.

Key Product Differences

The FMA3100 Series represents mass flow sensors without a display (e.g., model numbers ending in digits) or with an optional "P" suffix for the display version. The FMA3200 Series consists of controllers, available as models such as FMA3202 through FMA3206.

Dimensions differ by series:

• FMA3100: 47 L x 26 W x 90 mm H (1.87 x 1.03 x 3.55")
• FMA3200: 81 L x 26 W x 97 mm H (3.17 x 1.03 x 3.80")
• FMA3300: 47 L x 26 W x 127 mm H (1.87 x 1.03 x 5.0")

Weights are listed as 199 g (0.44 lb) for FMA3100, 386 g (0.85 lb) for FMA3200, and 249 g (0.55 lb) for FMA3300.

Accessories include power supply/output cables such as the FMA3115PW (115 Vac), FMA3230PW (230 Vac), and input/output cable combinations like FMA3215PW and FMA3223PW. The FMA3000C is a 1 m (3') cable with mating connector and stripped ends for use with power supplies having terminal connections.

Optional certifications include CE, RoHS, NIST calibration certificate (add suffix "-NISTAIR"), and an optional 1 YEAR WARRANTY. The series carries ISO 9001 and ISO 9002 approvals.