Series-GFM

00 No Range for Specialty Gas Only 01 10 SCCM Nitrogen 02 20 SCCM Nitrogen 03 50 SCCM Nitrogen 04 100 SCCM Nitrogen 05 200 SCCM Nitrogen 06 500 SCCM Nitrogen 07 1 LPM Nitrogen 08 2 LPM Nitrogen 09 5 LPM Nitrogen 11 15 LPM Nitrogen 31 30 LPM Nitrogen 33 50 LPM Nitrogen 42 100 LPM Nitrogen 43 200 LPM Nitrogen 44 500 LPM Nitrogen 45 1000 LPM Nitrogen

None -CCL2FCCLF2 0.2031 1,1,2-Trichloro-1,2,2 Trifluoroethane (Freon-113) -C2H2F2 0.4271 1,1-Difluoroethylene (Freon-1132A) -C4H6 0.3224 1,3-Butadiene -C4H8 0.2994 1-Butane -C3H12 0.2170 2,2-Dimethylpropane -C4H8CIS 0.3240 2-Butane -C4H8TRANS 0.2910 2-Butane -C2H2 0.5829 Acetylene -AIR 1.0000 Air -NH3 0.7310 Ammonia -AR 1.4573 Argon -ASH3 0.6735 Arsine -BR3 0.3800 Boron Tribromide -BCL3 0.4089 Boron Trichloride -BF3 0.5082 Boron Triflouride -BR2 0.8083 Bromine -BRF5 0.2600 Bromine Pentaflouride -BRF3 0.3855 Bromine Triflouride -CRF3 0.3697 Bromotrifluoromethane (Freon-13B1) -C4H10 0.2631 Butane -CO2 0.7382 Carbon Dioxide -CS2 0.6026 Carbon Disulfide -CO 1.0000 Carbon Monoxide -CCL4 0.3100 Carbon Tetrachloride -COF2 0.5428 Carbonyl Fluoride -COS 0.6606 Carbonyl Sulfide -CL2 0.8600 Chlorine -CLF3 0.4016 Chlorine Trifluoride -CHCLF2 0.4589 Chlorodifluoromethane (Freon-22) -CHCL3 0.3912 Chloroform -C2CLF5 0.2418 Chloropentafluoroethane (Freon-115) -CCLF3 0.3834 Chlorotrifluromethane (Freon-13) -C2N2 0.6100 Cyanogen -CICN 0.6130 Cyanogenchloride -C3H5 0.4584 Cyclopropane -D2 1.0000 Deuterium -B2H6 0.4357 Diborane -CR2F2 0.1947 Dibromodifluoromethane -CHCL2F 0.4252 Dichlofluoromethane (Freon-21) -CCL2F2 0.3538 Dichlorodifluoromethane (Freon-12) -(CH3)2SICL2 0.2522 Dichloromethylsilane -SIH2CL2 0.4044 Dichlorosilane -(CH3)2O 0.3896 Dimethyl Ether -(CH3)2NH 0.3714 Dimethylamine -C2H6 0.5000 Ethane -C2H6O 0.3918 Ethanol -C2H5CL 0.3891 Ethyl Chloride -C2H4 0.6000 Ethylene -C2H4O 0.5191 Ethylene Oxide -F2 0.9784 Fluorine -CHF3 0.4967 Fluoroform (Freon-23) -CCL3F 0.3287 Freon-11 -CCL2FCCLF2 0.2031 Freon-113 -C2H2F2 0.4271 Freon-1132A -C2CL2F4 0.2240 Freon-114 -C2CLF5 0.2418 Freon-115 -C2F6 0.2421 Freon-116 -CCL2F2 0.3538 Freon-12 -CCLF3 0.3834 Freon-13 -CBRF3 0.3697 Freon-13B1 -CF4 0.4210 Freon-14 -CHCL2F 0.4252 Freon-21 -CHCLF2 0.4589 Freon-22 -CHF3 0.4967 Freon-23 -C4F6 0.1760 Freon-C318 -GEH4 0.5696 Germane -GECL4 0.2668 Germanium Tetrachloride -HE 1.4540 Helium -C2F6 0.2421 Hexafluoroethane (Freon-116) -C6H14 0.1792 Hexane -H2 1.0106 Hydrogen -HBR 1.0000 Hydrogen Bromide -HCL 1.0000 Hydrogen Chloride -HCN 1.0700 Hydrogen Cyanide -HF 0.9998 Hydrogen Fluoride -HI 0.9987 Hydrogen Iodide -H2SE 0.7893 Hydrogen Selenide -H2S 0.8000 Hydrogen Sulfide -IF5 0.2492 Iodine Pentafluoride -CH(CH3)3 0.2700 Isobutane -KR 1.4530 Krypton -CH4 0.7175 Methane -CH3 0.5843 Methanol -C3H4 0.4313 Methyl Acetylene -CH2BR 0.5835 Methyl Bromide -CH3CL 0.6299 Methyl Chloride -CH3F 0.6800 Methyl Fluoride -CH3SH 0.5180 Methyl Mercaptan -(CH3)SICL3 0.2499 Methyl Trichlorosilane -MOF6 0.2126 Molybdenum Hexafluoride -C2H5NH2 0.3512 Monoethylamine -CH3NH2 0.5100 Monomethylamine -NE 1.4600 Neon -NO 0.9900 Nitric Oxide -N2 1.0000 Nitrogen -NO2 0.7370 Nitrogen Dioxide -NF3 0.4802 Nitrogen Trifluoride -NOCL 0.6134 Nitrosyl Chloride -N2O 0.7128 Nitrous Oxide -C4F6 0.1760 Octafluorocyclobutane (Freon-C318) -O2 0.9926 Oxygen -OF2 0.6337 Oxygen Difluoride -OZONE 0.4460 Ozone -B5H9 0.2554 Pentaborane -C5H12 0.2134 Pentane -CLO3F 0.3950 Perchloryl Fluoride -C3F8 0.1740 Perfluoropropane -COCL2 0.4438 Phosgene -PH3 1.0700 Phosphine -POCL3 0.3600 Phosphorous Oxychloride -PH5 0.3021 Phosphorous Pentafluoride -PCL3 0.3000 Phosphorous Trichloride -C3H8 0.3500 Propane -C3H6 0.4000 Propylene -SIH4 0.5982 Silane -SICL4 0.2840 Silicon Tetrachloride -SIF4 0.3482 Silicon Tetrafluoride -SO2 0.6900 Sulfur Dioxide -SF6 0.2635 Sulfur Hexafluoride -SO2F2 0.3883 Sulfuryl Fluoride -CF3CH2F 0.5096 Tetrafluoroethane (Forane-134A) -N2F4 0.3237 Tetrafluorohydrazine -TICL4 0.2691 Titanium Tetrachloride -C2HCL3 0.3200 Trichloro Ethylene -CCL3F 0.3287 Trichlorofluoromethane (Freon-11) -SIHCL3 0.3278 Trichlorosilane -(C4H9)AL 0.0608 Triisobutyl Aluminum -(CH3)3N 0.2792 Trimethylamine -WF6 0.2541 Tungsten Hexafluoride -UF6 0.1961 Uranium Hexafluoride -CH2CHBR 0.4616 Vinyl Bromide -CH2CHCL 0.4800 Vinyl Chloride -XE 1.4400 Xenon