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FMA6510ST

Mass Flow Controller w/RS485 Standard and Alarm Functions

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Volumetric Flow Rate, Max

200 SCCM 10 SCCM 20 SCCM 50 SCCM 100 SCCM 500 SCCM 1 SLM 2 SLM 5 SLM 10 SLM 15 SLM 20 SLM 30 SLM 40 SCCM 50 SLM 60 SLM 80 SLM 100 SLM

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C$3,206.09

Item# FMA6510ST

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Lead Time (If not in stock): 6 weeks

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Product Specs

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Brand
Accuracy	± 1 %
Accuracy Detail	Accuracy (including linearity): 15 to 25°C (59 to 77°F) and 0.7 to 4 bar (10 to 60 psia): ± 1% of FS, 0 to 50°C (32 to 122°F) and 0.3 to 10 bar (5 to 150 psia): ± 2% of FS, ± 1% of FS at a specific temperature and pressure with special calibration
Additional Features 1	2 SPDT 1A Relay
Calibration	NIST 10-Point Certificate
Circuit Protection	Reverse polarity, Current Limit, Resettable Fuse
Control Valve	Solenoid Valve
Data Interface	RS485
Data Interface Note	RS485, standard; RS232, optional
Display Type	None
Electrical Connection	Sub-D Male Miniature Connector
Electrical Output	0 to 5 V
Enclosure Ratings	Inst. Level II/Poll. Degree II (IEC 60664)
Leak Rate Under Vacuum	less than 10^⁻9 cc He/s
Materials, Wetted	316 Stainless Steel, 416 Stainless Steel, FKM
Media Compatibility	Air, Gases, Nitrogen, Oxygen
Operating Pressure, Max	500 psi
Operating Pressure, Min	0 psi
Operating Temperature, Max	50 °C
Operating Temperature, Min	5 °C
Optimum Pressure	25 psi
Output Detail	Linear 0 to 5 Vdc (2000 Ω min load impedance); 0 to 10 Vdc (4000 Ω min impedance); 4 to 20 mA optional (0 to 500 Ω loop resistance)
Output Signal	Voltage
Pressure Coefficient	0.01% FS/psi
Pressure Drop, Max	1.06 psi
Pressure, Max	50 psi
Process Connection Size	1/4 in
Process Connection Type	Compression Fitting
Repeatability	± 0.15%
Response Time	1 sec
Response Time Note	0.6 to 1.0 s to within ± 2% of setpoint over 20% to 100% FS
Supply Current	Up to 450 mA
Supply Voltage	± 15 Vdc
Temperature Coefficient	0.05% FS/°C
Turndown Ratio	50:1
Volumetric Flow Rate, Max	200 SCCM
Volumetric Flow Rate, Min	0.2 SCCM
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